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| Group: |
sci.physics.plasma |
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| Author: |
Toghraq |
| Subject: |
plasma chamber coating |
| Body: |
Hi Group,
I need to construct a plasma chamber for oxygen or hydrogen plasma
etching process. I have to coat the copper electrode and inner wall of
the chamber. I know that painting by carbon works fine. I was wandering
is there any better coating methods + materials for this purpose, where
the coating is more stable and sustain longer? Any advice would be very
much appreciated!
Best regards
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| Topic: |
plasma chamber coating |
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| Message: |
Author |
Date |
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*Message 1* |
Toghraq |
Thu, 13 Mar 2008, 9:39 am |
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